Raith Turnkey 150 SEM & E-beam lithography system

Repsonsible: Anders Liljeborg


Good bye Raith 150, dismantling the tool

The SEM (Scanning Electron microscope) and e-beam lithography system from Raith Gmbh was delivered on 28:th of May, 1999. It is a combination of a SEM manufactured by LEO Electron microscopy Ltd. (now acquired by Zeiss) using the Gemini column and a high precision laser interferometric stage combined with special D/A (digital-to-analog) converters for the e-beam deflection during lithography, both made by Raith Gmbh.

Manual for Turnkey 150     FBMS upgrade     Download Raith design software (limited access)

Please read the general rules about booking the system

Help running the Turnkey 150 for the experienced user.

Booking list for the SEM and E-beam system.

Phonelist, NanoFabLab users

Probe Current measurements      Maintenance Manual


Some projects using E-beam lithography

Pt nanoheater

Crack junctions

Photonic MEMS

Plasmonic Metamaterials

Hybrid Plasmonic Devices

Hybrid Plasmonic Cavity

Double slot hybrid ring resonator

Diffractive optics

Nanofocus X-ray zoneplate

Improved tungsten
zoneplate

Single Electron Transistor

Two capacitively coupled single electron devices

Josephson junction biased by 1-D SQUID array

Tunnel junctions / magneto-resistance

Some results, data and descriptions, internal access only

Check of beam focus after vacuumeter problem, 2016-11-30

Test results showing effect of step size    

Depth-of-focus for different apertures, estimation.

Images of filament/tip, terrace structures, replaced Dec. 2007    

Images of filament tip, broken, replaced 2004-04-05    

Probe current stability measurements.

Two-layer resist system, used for shadow evaporation, example, mostly used by Nanophys group.

Turnkey 150 without covers.

LED illumination replacement. 2013-11-12.

Tip exchange in column

Second tip exchange

Laser interferomteric stage

Close-up of stage support pins and current sensing pin for sample holder

Replacement of LEO Gemini column, 2004-11-10

Tip/filament exchange, 2006-07-07

Estimation of vibration levels after de-coupling of cooling pipes from AC-units, 2006-07-13


Some pictures from the previous lab at KTH-campus
Anders Liljeborg
Nanostructure Physics
KTH