Some results, projects and publications using Albanova E-beam lithography

Fresnel lens, grey level EBL

Pt nano-heater

Crack junctions

Example recipe neg. resist (maN-2403)

EBL structuring and biofunctionalization

Nanopore arrays

Photonic MEMS

Plasmonic Metamaterials

Hybrid Plasmonic Devices

Hybrid Plasmonic Cavity

Double slot hybrid ring resonator

Diffractive optics

Nanofocus X-ray zoneplate

Improved tungsten

Single Electron Transistor

Two capacitively coupled single electron devices

Josephson junction biased by 1-D SQUID array

Tunnel junctions / magneto-resistance

Anders Liljeborg
Albanova NanoLab