Surface profiler

Responsible: Anders Liljeborg

KLA Tencor P-15 surface profiler.

Resolution, vertical 0.1 Å, horisontal 0.5 µm, max. scan length 200 mm.

Short web-manual

Manufacturers specifications      Manufacturers web-site

Alternate system, optical profiler, commercial posting.


Albanova Nano-Fab-Lab
Anders Liljeborg