Particle count in Albanova Nanolab

2020-03-12

  

Made with one cycle of 2 minutes.

   

Particles per cubic foot (US FED STD 209E Cleanroom Standards)

Location

Count

  

Office Erik H., Adrian I., Anders L.

13000

  

    Nanolab

   

Entrance, work area

28935

  

Entrance, on bench

31030

  

    Process Lab

   

Center (table next to profiler)

3285

  

At sink

7510

  

Inside fumehood

7620

  

On chair at RIE2 computer

2655

  

Cleanbench 1, (left), halfspeed

0

  

Cleanbench 1, (left), halfspeed, on grille

30

  

Cleanbench 2, halfspeed

0

  

Cleanbench 3, halfspeed

0

  

Cleanbench 4, halfspeed

0

  

Cleanbench 5, fan OFF

   

Cleanbench 5, halfspeed

0

  

Table at Plasmalab 100 (CryoRIE)

3660

  

      Processlab Service

   

In front of gasbox for RIE2

5700

  

At short end

7480

  

      Ebeam Lab

   

LAF bench, sample mounting

0

  

SEM FEI/FIB, table, sample mounting

1945

  

     Service Ebeam/Deposition Lab

3525

  

     UHV/Deposition Lab

   

Eurovac, in front of loadlock

1160

  

At bonder

820

  

At AJA Orion sputter

1260

  

     Yellow Lab, HFM:s off

   

At microscope, LAF=on

5670

  

Inside LAF, LAF=on

0

  

       Small triang. lab, fluor.micr.

2880

  

       AFM-lab

   

At Icon front

1860

  

At FastScan front

3230

  

Inside LAF, LAF=on, fullspeed for lights on

0