Lithography Tools

Voyager EBL System including "traxx" (FBMS) and "periodixx" (MBMS)

Maskless Lithography tool, "SmartPrint"

Karl Süss Contact Mask Aligner, MJB3

Cannon PPC 210 Projection Print Camera

Some examples of lithography processes limited access.


Raith 150 Ebeam Lithography w. FBMS option
Decomissioned, kept for reference.


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